专利名称：Integrated actuator for optical switch mirror
array
发明人：Yael Nemirovsky申请号：US10004312申请日：20011206公开号：US06847752B2公开日：20050125
专利附图：
摘要：An integrated actuator for an optical switch mirror array, which uses a novelintegrated actuation technique combining electrostatic or electromagnetic (or both)actuation in combination with air (or any other gas) blast actuation. This combined
approach provides integrated actuation, by use of an air (or any gas) blast to move themirror to a tilt position, and with the application of the proper voltage, to have the pull-ineffect take over and move the mirror to its final position. The pull-in effect can beachieved also by a magnetic field. The integrated design provides advantages becausethe mechanical moment provided by a relatively small air (gas or fluid) blast issignificantly larger than the moment available from electrostatic or electro-magneticactuation at reasonable field strength levels. Thus, the required pull-in voltage can bereduced significantly while allowing manufacture of the mirror structure using superiormanufacturing materials employing thicker, crystalline silicon, as opposed to a thinpolysilicon layer. This increases reliability and rigidity, and the air (any gas or any fluid)blast will be sufficient to overcome the rigidity to make the mirror motion possible at theright time.
申请人：Yael Nemirovsky
地址：Haifa IL
国籍：IL
代理机构：Shiboleth, Yisraeli, Roberts, Zisman & Co.
代理人：Edward Langer
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