Method for generating multivariate analysis model

专利名称：Method for generating multivariate analysis

model expression for processing apparatus,method for executing multivariate analysisof processing apparatus, control device ofprocessing apparatus and control systemfor processing apparatus

发明人：Masayuki Tomoyasu,Hin Oh,Hideki Tanaka申请号：US11003829申请日：20041206公开号：US07505879B2公开日：20090317

专利附图：

摘要：According to the present invention, multivariate analysis model expressions aregenerated for a plasma processing apparatus A and a plasma processing apparatus B byexecuting a multivariate analysis of detection data provided by a plurality of sensorsincluded in each plasma processing apparatus when the plasma processing apparatuses Aand B operate based upon first setting data. Then, when the plasma processing

apparatus A operates based upon new second setting data, detection data provided bythe plurality of sensors in the plasma processing apparatus A are used to generate acorresponding multivariate analysis model expression, and by using the new multivariateanalysis model expression corresponding to the plasma processing apparatus Agenerated based upon the second setting data and to the plasma processing apparatusB, a multivariate analysis model expression corresponding to the new second setting datais generated four the plasma processing apparatus B.

申请人：Masayuki Tomoyasu,Hin Oh,Hideki Tanaka

地址：Yamanashi JP,Shanghai CN,Yamanashi JP

国籍：JP,CN,JP

代理机构：Finnegan, Henderson, Farabow, Garrett & Dunner, LLP

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