Charged Particle Beam Apparatus

专利名称：Charged Particle Beam Apparatus发明人：Hideo Morishita,Michio Hatano,Takashi

Ohshima,Mitsugu Sato,TetsuyaSawahata,Sukehiro Ito,Yasuko Aoki

申请号：US13521273申请日：20110112

公开号：US201202988A1公开日：20121129

专利附图：

摘要：In order to provide a charged particle beam apparatus that can detect chargedparticle beam signals in discrimination into a plurality of energy bands, and obtain high-

resolution images for each of the energy bands using the signals, the charged particlebeam apparatus has a charged particle source (-); an aperture () that limits the diameterof the charged particle beam (); optics () for the charged particle beam; a specimenholder (); a charged particle detector () that detects secondary charged particles andreflected charged particles from a specimen; and signal calculation unit that processesthe output signal from the charged particle detector. The charged particle detector () isprovided with a first small detector () having a first detection sensitivity and a secondsmall detector () having a second detection sensitivity, and makes the detection solidangle viewed from a position on the specimen, to which the charged particle beam () is tobe radiated, to be the same for the first small detector () and the second small detector().

申请人：Hideo Morishita,Michio Hatano,Takashi Ohshima,Mitsugu Sato,TetsuyaSawahata,Sukehiro Ito,Yasuko Aoki

地址：Hachioji JP,Hitachinaka JP,Saitama JP,Hitachinaka JP,Hitachinaka JP,HitachinakaJP,Mito JP

国籍：JP,JP,JP,JP,JP,JP,JP

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