Multilayer ceramic substrate, its production metho

专利名称：Multilayer ceramic substrate, its production

method, and apparatus used for itsproduction

发明人：Hideaki Ninomiya,Haruo Nishino,Kiyoshi

Hatanaka

申请号：US103972申请日：20030131

公开号：US200400472A1公开日：20040513

专利附图：

摘要：This invention provides a multilayer ceramic substrate which has a consistent

quality, and which has with no swelling or collapse in the inner periphery of the cavity,wherein the bottom of the cavity is flat to enable stable packaging of the desired deviceat a high precision, and wherein L and C can be formed by the internal conductor at a highprecision; and a method for producing a multilayer ceramic substrate and an apparatustherefor by which a multilayer ceramic substrate can be readily produced in a simpleprocedure by using an apparatus of simple structure. This invention has realized amultilayer ceramic substrate comprising a laminate constituted from laminated ceramiclayers to and internal conductors formed between the ceramic layers to , wherein thelaminate has end surfaces on opposite ends of its thickness direction, and the laminate isformed with a cavity which opens to at least one end surface of the laminate, and whereinthe multilayer ceramic substrate is provided at least with a capacitor and/or an inductorconstituted by the internal conductors ; its production method; and an apparatus used insuch production.

申请人：TDK CORPORATION

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