DEVICE AND METHOD FOR INTERFEROMETRIC MEASURING OF

专利名称：DEVICE AND METHOD FOR

INTERFEROMETRIC MEASURING OF ANOBJECT

发明人：Matthias Schussler,Christian

Rembe,Alexander Drabenstedt,RobertKowarsch,Wanja Ochs

申请号：US13667309申请日：20121102

公开号：US20130107276A1公开日：20130502

专利附图：

摘要：A device for the interferometric measuring of an object, including a light sourceto generate an emitted beam, a beam splitting device for splitting the emitted beam intoa measuring beam and at least first and second reference beams, an optic interferencedevice, and first and second detectors, with the interference device and the first detectorbeing embodied cooperating such that the measuring beam, at least partially reflectedby the object, and the first reference beam are interfered on at least one detector areaof the first detector. The interference device and the second detector are embodiedcooperating such that the measuring beam, at least partially scattered by the object, andthe second reference beam are interfered on at least one detector area of the seconddetector. A method is also provided for the interferometric measuring of an object.

申请人：Polytec GmbH

地址：Waldbronn DE

国籍：DE

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