专利名称：Apparatus and method for polarization
diversity imaging and alignment
发明人：Keith Serrels,Prasad Sabbineni,James S.
Vickers
申请号：US13679938申请日：20121116公开号：US09361533B2公开日：20160607
专利附图：
摘要：A method of obtaining two orthogonally polarized super-resolution images isprovided. A first diffraction-limited image is obtained using horizontally polarized light; a
second diffraction-limited image is obtained using vertically polarized light; and, the firstand second images are processed so as to yield a convoluted image having super
diffraction-limited performance in both dimensions. Enhanced alignment of CAD image toacquired image is facilitated using the horizontally and vertically polarized images.
申请人：DCG Systems, Inc.
地址：Fremont CA US
国籍：US
代理机构：Nixon Peabody LLP
代理人：Joseph Bach, Esq.
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