专利名称：Scanning optical microscope发明人：Mitch, John H.申请号：EP88302276.6申请日：19880316公开号：EP0283256A3公开日：19900207
专利附图：
摘要：A scanning optical microscope is disclosed in which the laser that illuminates thespecimen is also used as a component of the optical detector system. This dual use ofthe laser permits substantial simplification of the microscope optics and the associatedscanning mechanism. For example, the beam splitters and other bulk optic components
required in prior art devices are replaced by a single optical fiber linking the laser and thespecimen. A micro-lens is formed on the terminal end of the fiber to focus the laser lightonto the specimen. The optical fiber is mounted over the specimen and its terminal endportion is caused to swing back and forth in reciprocal motion above it, this motion beinginduced by electromagnetic or electrostatic interaction between the fiber and associatedelectromagnets or deflection plates. The periodic drive signals that induce thisoscillatory fiber motion are synchronized to the fiber's natural mechanical resonantfrequency by an optical position detector.
申请人：TEKTRONIX INC.
地址：Howard Vollum Park 14150 S.W. Karl Braun Drive P.O.Box 500, Mail Stop 50-PATBeaverton Oregon 97077-0001 US
国籍：US
代理机构：Baillie, Iain Cameron
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