High dynamic range optical inspection system and m

专利名称：High dynamic range optical inspection

system and method

发明人：Rajeshwar Chhibber,David Willenborg申请号：US10672056申请日：20030925

公开号：US20040207836A1公开日：20041021

专利附图：

摘要：A high dynamic range and high precision broadband optical inspection systemand method are provided. The system provides capability of optical inspection of

patterned and unpatterned substrates in which a very large dynamic range with very high

precision is desirable to provide detection of light scattering defects from sub micron tohundreds of microns in size. The system permits high throughput substrate inspection inwhich the sides, bevels and edges of the substrate may be rapidly or simultaneouslyinspected for defects.

申请人：CHHIBBER RAJESHWAR,WILLENBORG DAVID

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